Production of Large Volume Cylindrical Rf Plasma Using Circular Magnetic Line Cusp Field
Year: 1993
Type: book-chapter
Source: Elsevier eBooks
Authors: K. YAMAUCHI, M. SHIBAGAKI, A. KONO, K. TAKAHASHI, T. SHEBUYA, E. YABE, K. TAKAYAMA
Institutions: Showa Shinku Co., Ltd. (Japan), Tokai University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W200745502