Work

Advanced Thermal Processing of Semiconductor Materials by Flash Lamp Annealing

Year: 2004

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-810-c4.16

Authors: W. Skorupa, D. Panknin, M. Voelskow, W. Anwand, T. Gebel, R. A. Yankov, Silke Paul, Wilfried Lerch

Institution: Helmholtz-Zentrum Dresden-Rossendorf

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: European Commission

OpenAlex ID: W2007476110

FWCI: 0.316

Cites: 5

Cited by: 10

Related to: 10