Phosphorus doping of Si nanocrystals embedded in silicon oxynitride determined by atom probe tomography
Year: 2014
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.4862174
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
Award: G3903734699
OpenAlex ID: W2007508126
