Surface morphologies of sputter-deposited aluminum films studied using a high-resolution phase-measuring laser interferometric microscope
Year: 1996
Type: article
Source: Applied Optics
DOI: 10.1364/ao.35.000701
Authors: Masakazu Furukawa, Yoshito Yamamoto, Hiroshi Ikakura, Nobuo Tanaka, Masayuki Hashimoto, Atsushi Sano, Shoso Shingubara
Institutions: Canon (Japan), Hiroshima University
Language: English
Subfield: Instrumentation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2007706530