Work

Two-Dimensional Model of a Direct Current Glow Discharge: Description of the Electrons, Argon Ions, and Fast Argon Atoms

Year: 1996

Type: article

Source: Analytical Chemistry

DOI: 10.1021/ac9510651

Authors: A. Bogaerts, R. Gijbels, W. J. Goedheer

Institutions: University of Antwerp, Foundation For Fundamental Research On Matter

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Fonds De La Recherche Scientifique - FNRS

OpenAlex ID: W2007779490

FWCI: 12.12

Cites: 29

Cited by: 82

Related to: 10