Work

III–V surface processing

Year: 1992

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.577680

Author: S. Ingrey

Institution: Bell (Canada)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2007789286

FWCI: 5.099

Cites:

Cited by: 38

Related to: 10