Work

Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering

Year: 1985

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.573255

Authors: B. O. Johansson, J.-E. Sundgren, J. E. Greene, A. Rockett, S. A. Barnett

Institutions: Linköping University, University of Illinois Urbana-Champaign

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Vetenskapsrådet, University of Illinois at Urbana-Champaign

OpenAlex ID: W2007805072

FWCI: 15.67

Cites:

Cited by: 207

Related to: 10