Work

Applications of excimer lasers in microelectronics

Year: 1991

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.51043

Authors: Chang Yu, Gurtej S. Sandhu, V. K. Mathews, Trung T. Doan

Institution: Micron (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2008138299

FWCI:

Cites:

Cited by: 2

Related to: 10