Work

Microsystem technology: Between research and industrial application

Year: 1998

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(98)00011-2

Authors: M. Abraham, W. Ehrfeld, V. Hessel, K.P. Kämper, M. Lacher, A. Picard

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2008198060

FWCI: 1.419

Cites: 4

Cited by: 14

Related to: 10