Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications
Year: 1997
Type: article
Source: Sensors and Actuators A Physical
Authors: P.-F Indermühle, G Schürmann, G.-A Racine, N.F de Rooij
Institution: University of Neuchâtel
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2008329993