Work

Design and optimisation of microelectromechanical systems: a review of the state-of-the-art

Year: 2010

Type: article

Source: International Journal of Design Engineering

DOI: 10.1504/ijde.2010.032822

Authors: Elhadj Benkhelifa, Michael Farnsworth, Ashutosh Tiwari, Gergely Bandi, Meiling Zhu

Institution: Cranfield University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: California Institute of Technology, Research Councils UK, Danmarks Tekniske Universitet

OpenAlex ID: W2008489143

FWCI: 1.513

Cites: 72

Cited by: 20

Related to: 10