Work

Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics

Year: 2009

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2009.02.084

Authors: V. Jousseaume, G. Rolland, D. Babonneau, J.P. Simon

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Centre National de la Recherche Scientifique, Université de Poitiers, Université Joseph Fourier, Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2008496041

FWCI: 0.81

Cites: 21

Cited by: 18

Related to: 10