Work

Fault Detection via Sparse Representation for Semiconductor Manufacturing Processes

Year: 2014

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2014.2302011

Authors: Likun Ren, Weimin Lv

Institution: Naval Aeronautical and Astronautical University

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2008686164

FWCI: 3.717

Cites: 16

Cited by: 25

Related to: 10