Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon
Year: 1995
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-387-413
Authors: K. Mahfoud, B. Hartiti, J. C. Muller, P. Siffert
Institution: Centre National de la Recherche Scientifique
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2008708917