Work

Fabrication of three-dimensional microstructures by high resolution x-ray lithography

Year: 1999

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.591027

Authors: C. Cuisin, Y. Chen, D. Decanini, A. Chelnokov, F. Carcenac, A. Madouri, J. M. Lourtioz, H. Launois

Institution: Centre National de la Recherche Scientifique

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Centre National de la Recherche Scientifique, Conseil National de la Recherche Scientifique

OpenAlex ID: W2009487388

FWCI: 1.775

Cites: 14

Cited by: 17

Related to: 10