Work

Stress-induced curvature of focused ion beam fabricated microcantilevers

Year: 2008

Type: article

Source: Micro & Nano Letters

DOI: 10.1049/mnl:20070072

Authors: P.D. Prewett, C.J. Anthony, D. Cheneler, M.C.L. Ward

Institution: University of Birmingham

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2009596826

FWCI: 2.395

Cites: 9

Cited by: 13

Related to: 10