Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled plasmas in argon
Year: 2008
Type: article
DOI: 10.1116/1.2981064
Authors: K. Denpoh, P. L. G. Ventzek
Institution: Tokyo Electron (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2010179558