Work

Particle Deposition and Removal from Ge Wafers

Year: 2007

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/www.scientific.net/ssp.134.173

Authors: Sonja Sioncke, Marcel Lux, Wim Fyen, Marc Meuris, Paul W. Mertens, Antoon Theuwis

Institutions: IMEC, Umicore (Belgium), Umicore (United States), Umicore (Germany)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2010216555

FWCI: 0.611

Cites: 1

Cited by: 4

Related to: 10