Influence of high power densities on the composition of pulsed magnetron plasmas
Year: 2002
Type: article
Source: Vacuum
Authors: A.P. Ehiasarian, R. New, W.-D. Münz, L. Hultman, U. Helmersson, V. Kouznetsov
Institutions: Sheffield Hallam University, Linköping University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2010378341