Work

Interface characterization of B 4 C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering

Year: 2013
Type: article
Abstract: B4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B4C, Mo/B4C and La/B4C multilayers were compared. W/B4C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B4C and Mo/B4C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B4C-based multilayers.
Language: English
Open Access status: bronze
OpenAlex ID: W2010560087
FWCI: 0.887
Cites: 16
Cited by: 13
Related to: 10