Effect of Tantalum Addition on Optical Transmittance and Electrical Resistivity of TiN Thin Films Prepared by d.c. Magnetron Sputtering
Year: 2001
Type: article
Source: Key engineering materials
Institution: University Frères Mentouri Constantine 1
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W2010575830
