Work

Plasmonic ‘top-hat’ nano-star arrays by electron beam lithography

Year: 2015

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2015.04.084

Authors: Shaoli Zhu, Han-Hao Cheng, Idriss Blakey, Nicholas Stokes, Kostya (Ken) Ostrikov, Michael Cortie

Institutions: University of Technology Sydney, The University of Queensland, Commonwealth Scientific and Industrial Research Organisation, Queensland University of Technology, CSIRO Manufacturing

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: University of Technology Sydney, University of Queensland, Australian Research Council

Awards: G4732693170, G6294453703

OpenAlex ID: W2010595281

FWCI: 0.804

Cites: 16

Cited by: 9

Related to: 10