Work

1 MV rotating-disc type high voltage generator for application to an implanter

Year: 1985

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(85)90642-1

Authors: A. Isoya, Y. Miyake, K. Takagi, T. Uchiyama, K. Yui, R. Kikuchi, S. Komiya, C. Hayashi

Institutions: Kyushu University, Ulvac (Japan)

Language: English

Topic: Pulsed Power Technology Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2010600932

FWCI: 1.085

Cites: 1

Cited by: 11

Related to: 10