Work

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti–Si–C thin film

Year: 2013

Type: article

Source: Materials Science and Technology

DOI: 10.1179/1743284713y.0000000236

Authors: Z S Chen, H J Li, Q G Fu, D Yang, Q L Shen

Institutions: Northwestern Polytechnical University, State Key Laboratory of Solidification Processing

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2010657359

FWCI: 0.314

Cites: 27

Cited by: 9

Related to: 10