Work

Manufacturing of microstructures with high aspect ratio by micromachining

Year: 2008

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-007-0535-6

Authors: T. Gietzelt, L. Eichhorn, K. Schubert

Institution: Karlsruhe Institute of Technology

Language: English

Topic: Advanced Machining and Optimization Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2011365744

FWCI: 1.597

Cites:

Cited by: 16

Related to: 10