Work

Tantalum Films Triode-Sputtered in Mixtures of Argon and Water Vapor

Year: 1972

Type: article

Source: Journal of Vacuum Science and Technology

DOI: 10.1116/1.1317843

Authors: W. D. Westwood, D. J. Willmott, P. S. Wilcox

Institution: Bell (Canada)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2011454504

FWCI: 5.873

Cites:

Cited by: 10

Related to: 10