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Novel Design for Optical Scanner with Piezoelectric Film Deposited by Metal Organic Chemical Vapor Deposition

Year: 2010

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.49.04dl19

Authors: Hirokazu Matsuo, Yusuke Kawai, Masayoshi Esashi

Institutions: The Nippon Signal Co., Ltd. (Japan), Tohoku University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2011506591

FWCI: 1.192

Cites: 15

Cited by: 6

Related to: 10