Work

Optical inspection of complex patterns of microelectronics products

Year: 2008

Type: article

Source: CIRP Annals

DOI: 10.1016/j.cirp.2008.03.127

Authors: J. You, S.-W. Kim

Institution: Korea Advanced Institute of Science and Technology

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012096027

FWCI: 2.03

Cites: 11

Cited by: 15

Related to: 10