Work

Application of microforging to SiCN MEMS fabrication

Year: 2002

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(01)00725-7

Authors: Yiping Liu, Li-Anne Liew, Ruiling Luo, Linan An, Martin L. Dunn, Victor M. Bright, John W. Daily, Rishi Raj

Institutions: University of Colorado Boulder, University of Colorado System, University of Central Florida

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: University of Washington, Air Force Institute of Technology

OpenAlex ID: W2012238320

FWCI: 3.502

Cites: 9

Cited by: 75

Related to: 10