A Silicon Nitride MIM Capacitor for Analog/Mixed-Signal Integrated Circuit using Manufacturable Atomic Layer Deposition Equipment
Year: 2007
Type: conference-paper
Source: ECS Transactions
DOI: 10.1149/1.2779069
Authors: Toshio Ando, Yosuke Ohta, Hiroshi Ashihara, Toshinori Imai
Institution: Hitachi (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2012305123