Work

Hardness, internal stress and fracture toughness of epitaxial AlxGa1−xAs films

Year: 1994

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(94)90180-5

Authors: K. Hjort, F. Ericson, J.-Å. Schweitz, C. Hallin, E. Janzén

Institutions: Uppsala University, Linköping University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012305298

FWCI: 2.58

Cites: 13

Cited by: 19

Related to: 10