Work

Improving the measurement of thick and thin films with optical profiling techniques

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.726187

Authors: Cristina Cadevall, Carles Oriach-Font, Roger Artigas, Agustí Pintó, Ferran Laguarta

Institution: Universitat Politècnica de Catalunya

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funder: Ministerio de Ciencia y Tecnología

OpenAlex ID: W2012380233

FWCI: 0.547

Cites:

Cited by: 5

Related to: 10