Work

Ambient pressure dried SiO2 aerogel film on GaAs for application to interlayer dielectrics

Year: 2002

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(02)00818-0

Authors: Sung-woo Park, Sang-bae Jung, Jun-kyu Yang, Hyung-ho Park, Hae-cheon Kim

Institutions: Yonsei University, Electronics and Telecommunications Research Institute

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012390451

FWCI:

Cites: 13

Cited by: 2

Related to: 10