Work

Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

Year: 2014

Type: conference-paper

Source: International Conference on Optical MEMS and Nanophotonics

DOI: 10.1109/omn.2014.6924611

Authors: Yi Chiu, Wen-Ching Lai, Chun-Hao Chang, Chun-Po Chang, Ching-Hung Chen, Chih-Hsiang Lai, Wei-Hung Hsu

Institutions: National Yang Ming Chiao Tung University, Industrial Technology Research Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012415808

FWCI: 0.401

Cites: 6

Cited by: 1

Related to: 10