Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation
Year: 2011
Type: article
Authors: Tae-Kyu Kim, Chihyun Jung, Tae-Eog Lee
Institution: Korea Advanced Institute of Science and Technology
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2012448698