Work

Contact degradation due to material transfer in MEM switches

Year: 2012

Type: article

Source: Microelectronics Reliability

DOI: 10.1016/j.microrel.2012.06.044

Authors: A. Peschot, C. Poulain, F. Souchon, P.-L. Charvet, N. Bonifaci, O. Lesaint

Institutions: Centre National de la Recherche Scientifique, Université Joseph Fourier, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information, Laboratoire de Génie Électrique de Grenoble

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012591637

FWCI: 1.635

Cites: 15

Cited by: 17

Related to: 10