Work

Effect of deposition temperature on the microstructure and surface morphology of c-axis oriented AlN films deposited on sapphire substrate by RF reactive magnetron sputtering

Year: 2012

Type: article

Source: Superlattices and Microstructures

DOI: 10.1016/j.spmi.2012.08.003

Authors: Xu-Ping Kuang, Hua-Yu Zhang, Gui-Gen Wang, Lin Cui, Can Zhu, Lei Jin, Rui Sun, Jie-Cai Han

Institution: Harbin Institute of Technology

Language: English

Topic: GaN-based semiconductor devices and materials

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012811044

FWCI: 1.776

Cites: 35

Cited by: 42

Related to: 10