Methods and factors to optimize OPC run-time
Year: 2007
Type: conference-paper
DOI: 10.1117/12.714182
Authors: A. D. Dave, C. P. Babcock, S. N. McGowan, Y. Zou
Institution: Advanced Micro Devices (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013065232