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Control relevant issues in semiconductor manufacturing: Overview with some new results

Year: 2006

Type: article

Source: Control Engineering Practice

DOI: 10.1016/j.conengprac.2006.11.003

Authors: An-Jhih Su, Jyh-Cheng Jeng, Hsiao-Ping Huang, Cheng-Ching Yu, Shih-Yu Hung, Ching-Kong Chao

Institutions: National Taiwan University, Nan Kai University of Technology, National Taiwan University of Science and Technology

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013222344

FWCI: 3.086

Cites: 35

Cited by: 62

Related to: 10