Enhanced resolution and groove-width simulation in cold development of ZEP520A
Year: 2011
Type: article
DOI: 10.1116/1.3569892
Authors: Takeru Okada, Jiro Fujimori, Makoto Aida, Megumi Fujimura, Tatsuya Yoshizawa, Masahiro Katsumura, Tetsuya Iida
Institution: Pioneer (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013333397