Work

Polycrystalline silicon thin films for MEMS applications

Year: 2003

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(02)01201-4

Authors: H. Mahfoz-Kotb, A.C. Salaün, T. Mohammed-Brahim, F. Le Bihan, M. El-Marssi

Institutions: Institut d'Électronique et des Technologies du numéRique, Université Rennes 1, Université de Rennes, Laboratoire de physique de la matière condensée, Université de Picardie Jules Verne

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013509347

FWCI: 1.655

Cites: 13

Cited by: 18

Related to: 10