RIE texturing optimization for thin c-Si solar cells in SF6/O2plasma
Year: 2008
Type: article
Authors: J Yoo, Kyunghae Kim, M Thamilselvan, N Lakshminarayn, Young Kuk Kim, Jaehyeong Lee, Kwon Jong Yoo, Junsin Yi
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013709983
