Pt/BaxSr(1-x)TiO3/Pt Capacitor Technology for 0.15 µm Embedded Dynamic Random Access Memory
Year: 2004
Type: article
DOI: 10.1143/jjap.43.2457
Authors: Yoshikazu Tsunemine, Tomonori Okudaira, Keiichiro Kashihara, Akie Yutani, Hiroki Shinkawata, Motaharul Kabir Mazumder, Yoshikazu Ohno, Masahiro Yoneda, Yasutoshi Okuno, Akihiko Tsuzumitani, Hisashi Ogawa, Yoshihiro Mori
Institution: Panasonic (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013750018