Work

Analysis of the impact of pupil shape variation by pupil fit modeling

Year: 2010

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.846703

Authors: Jin-hyuck Jeon, Chan-ha Park, Hyun-jo Yang, Cheol-kyun Kim, Jin-young Choi, Sang-jin Oh, Dong-gyu Yim, Sung-ki Park, Ki-yeop Park, Young-hong Min, Andre Engelen, Bart Smeets, Joerg Zimmermann

Institutions: ASML (Netherlands), Carl Zeiss (Germany)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013996757

FWCI: 0.428

Cites:

Cited by: 2

Related to: 10