Work

Low damage smoothing of magnetic material films using a gas cluster ion beam

Year: 2007

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2007.01.110

Authors: S. Kakuta, S. Sasaki, T. Hirano, K. Ueda, T. Seki, S. Ninomiya, M. Hada, J. Matsuo

Institutions: Hitachi (Japan), Kyoto University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014091313

FWCI: 2.136

Cites: 5

Cited by: 18

Related to: 10