Work

Deposition of conventional and gradient optical coatings by ECR plasma-enhanced chemical vapor deposition

Year: 1996

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.246840

Authors: Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet, Anatoli A. Chtcherbakov

Institution: École Polytechnique

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014583091

FWCI: 3.395

Cites: 23

Cited by: 7

Related to: 10