Work

Angle Performance on Optima XE

Year: 2011

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.3548423

Authors: Jonathan David, Shu Satoh, Jiro Matsuo, Masataka Kase, Takaaki Aoki, Toshio Seki

Institution: Axcelis Technologies (United States)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014629211

FWCI: 5.964

Cites:

Cited by: 5

Related to: 10