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Closed loop high precision position control system with optical scale

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.791115

Authors: Cheng-liang Ge, Yuan Liao, Zhong-wu He, Zhong-xiang Luo, Zhi-wei Huang, Min Wan, Xiao-yang Hu, Guo-bin Fan, Zheng Liang

Institutions: University of Electronic Science and Technology of China, China Academy of Engineering Physics

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014826006

FWCI:

Cites: 1

Cited by: 1

Related to: 10