Work

Dissipative particle dynamics study on directed self-assembly in holes

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2011069

Authors: T. Nakano, M. Matsukuma, K. Matsuzaki, M. Muramatsu, T. Tomita, T. Kitano

Institutions: Tokyo Electron (Japan), Tokyo Electron Kyushu Ltd (Japan)

Language: English

Topic: Block Copolymer Self-Assembly

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014966263

FWCI: 20.27

Cites:

Cited by: 17

Related to: 10