Work

Focused ion beam machined nanostructures depth profiled by macrochannelling ion beam analysis

Year: 2006

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2006.03.179

Authors: S.M. Orbons, L. van Dijk, M. Bozkurt, P.N. Johnston, P. Reichart, D.N. Jamieson

Institutions: The University of Melbourne, RMIT University, Eindhoven University of Technology

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

Funders: Australian National University, University of Melbourne, Australian Research Council

OpenAlex ID: W2015128508

FWCI:

Cites: 7

Cited by: 3

Related to: 10